Elemental Composition of Reactively Sputtered Indium Nitride Thin Films
Kumar, Sunil, Mo, Li, Motlan, Motlan, Tansley, Trevor L.Volume:
35
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.35.2261
Date:
April, 1996
File:
PDF, 846 KB
1996