[IEEE 2013 Joint IEEE Int'l Symp on Applications of Ferroelectrics & Workshop on Piezoresponse Force Microscopy (ISAF/PFM) - Prague 4, Czech Republic (2013.07.21-2013.07.25)] 2013 Joint IEEE International Symposium on Applications of Ferroelectric and Workshop on Piezoresponse Force Microscopy (ISAF/PFM) - Using a new design of piezoelectric device for micro-UEDM application
Yung Ting,, Bing-Kuan Hou,, Chih-Hsuan Yu,, Hsiang-Hung Huang,, Chin-Chih Yeh,, Chia-An Wei,Year:
2013
Language:
english
DOI:
10.1109/ISAF.2013.6748743
File:
PDF, 1.55 MB
english, 2013