Structurally decoupled micromachined gyroscopes with...

Journal of Micromechanics and Microengineering 2005 / 05 Vol. 15; Iss. 5

Structurally decoupled micromachined gyroscopes with post-release capacitance enhancement

Acar, Cenk, Shkel, Andrei M
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Volume:
15
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/15/5/028
Date:
May, 2005
File:
PDF, 3.20 MB
english, 2005
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