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Susceptibility of SiO2, ZrO2, and HfO2 dielectrics to moisture contamination
Prashant Raghu, Chris Yim, Farhang Shadman, Eric SheroVolume:
50
Year:
2004
Language:
english
Pages:
8
DOI:
10.1002/aic.10148
File:
PDF, 175 KB
english, 2004