Mass and heat transfer modeling of a physical vapor...

Mass and heat transfer modeling of a physical vapor deposition effusion source

S. Tobias Junker, Robert W. Birkmire, Francis J. Doyle III
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Volume:
51
Year:
2005
Language:
english
Pages:
17
DOI:
10.1002/aic.10331
File:
PDF, 813 KB
english, 2005
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