Study of the kinetics of step and flash imprint lithography...

Study of the kinetics of step and flash imprint lithography photopolymerization

Michael D. Dickey, Ryan L. Burns, E. K. Kim, Steve C. Johnson, Nick A. Stacey, C. Grant Willson
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Volume:
51
Year:
2005
Language:
english
Pages:
9
DOI:
10.1002/aic.10477
File:
PDF, 200 KB
english, 2005
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