Characterization in silicon processing: Y. Strausser (Editor). Materials Characterization Series. Surfaces, Interfaces, Thin Films. Butterworth-Heineman, Oxford, 1993, 240 pp., £ 47.50
Madeleine GandaisVolume:
42
Year:
1994
Language:
english
DOI:
10.1016/0301-7516(94)90025-6
File:
PDF, 50 KB
english, 1994