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Comparative studies of very thin shadowing films produced by atom beam sputtering and electron beam evaporation
Ivo Wildhaber, Heinz Gross, Hans MoorVolume:
16
Year:
1985
Language:
english
Pages:
10
DOI:
10.1016/0304-3991(85)90100-7
File:
PDF, 2.29 MB
english, 1985