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[IEEE 2010 IEEE International Solid- State Circuits Conference - (ISSCC) - San Francisco, CA, USA (2010.02.7-2010.02.11)] 2010 IEEE International Solid-State Circuits Conference - (ISSCC) - ES4: Fusion of MEMS and circuits
Shigematsu, Satoshi, Arimoto, Kazutami, Hagleitner, ChristophYear:
2010
Language:
english
DOI:
10.1109/ISSCC.2010.5433878
File:
PDF, 1.51 MB
english, 2010