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Defined micropatterns of platinum thin films by inductively coupled plasma etching using SF6/Ar/O2 mixture gas
Yao, Zhao, Wang, Cong, Sung, Ho-Kun, Kim, Nam-YoungVolume:
27
Language:
english
Journal:
Materials Science in Semiconductor Processing
DOI:
10.1016/j.mssp.2014.06.048
Date:
November, 2014
File:
PDF, 1.26 MB
english, 2014