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Encapsulation of ionic polymer-metal composite (IPMC) sensors with thick parylene: Fabrication process and characterization results
Lei, Hong, Li, Wen, Tan, XiaoboVolume:
217
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2014.05.013
Date:
September, 2014
File:
PDF, 2.72 MB
english, 2014