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A theoretical comparison between interferometric and optical beam deflection technique for the measurement of cantilever displacement in AFM
Constant A.J. Putman, Bart G. de Grooth, Niek F. van Hulst, Jan GreveVolume:
42-44
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/0304-3991(92)90474-x
File:
PDF, 322 KB
english, 1992