Accurate modeling of air shear damping of a silicon lateral...

Sensors and Actuators A: Physical 2014 / 09 Vol. 216

Accurate modeling of air shear damping of a silicon lateral rotary micro-resonator for MEMS environmental monitoring applications

Hosseinzadegan, H., Pierron, O.N., Hosseinian, E.
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Volume:
216
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2014.06.008
Date:
September, 2014
File:
PDF, 1.75 MB
english, 2014
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