Systematic characterization of optical beam deflection...

Measurement 2014 / 10 Vol. 56

Systematic characterization of optical beam deflection measurement system for micro and nanomechanical systems

Herfst, R.W., Klop, W.A., Eschen, M., van den Dool, T.C., Koster, N.B., Sadeghian, H.
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Volume:
56
Language:
english
Journal:
Measurement
DOI:
10.1016/j.measurement.2014.06.016
Date:
October, 2014
File:
PDF, 2.25 MB
english, 2014
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