Nonlinear Dynamic Analysis of Electrostatically Actuated Resonant MEMS Sensors Under Parametric Excitation
Zhang, Wen-Ming, Meng, GuangVolume:
7
Language:
english
Journal:
IEEE Sensors Journal
DOI:
10.1109/JSEN.2006.890158
Date:
March, 2007
File:
PDF, 1.16 MB
english, 2007