[IEEE 2014 14th International Workshop on Junction Technology (IWJT) - Shanghai, China (2014.5.18-2014.5.20)] 2014 International Workshop on Junction Technology (IWJT) - Investigation of Si Implantation into ILD (Interlayer Dielectric) for film property modification
He, Yonggen, Cai, Guohui, Zhou, Zuyuan, He, Youfeng, Zhao, Jie, Song, Weiji, Yu, Shaofeng, Wu, Jingang, Lu, Jun Feng, Zhao, GanmingYear:
2014
Language:
english
DOI:
10.1109/IWJT.2014.6842042
File:
PDF, 370 KB
english, 2014