[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - X-Y and Z-axis capacitive accelerometers packaged in an ultra-clean hermetic environment
Hong, V. A., Lee, B. J., Christensen, D. L., Heinz, D. B., Ng, E. J., Ahn, C. H., Yang, Y., Kenny, T. W.Year:
2013
Language:
english
DOI:
10.1109/Transducers.2013.6626842
File:
PDF, 1.53 MB
english, 2013