Thin film free-standing PEDOT:PSS/SU8 bilayer microactuators
Taccola, S, Greco, F, Mazzolai, B, Mattoli, V, Jager, E W HVolume:
23
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/23/11/117004
Date:
November, 2013
File:
PDF, 826 KB
english, 2013