Fabrication of high-aspect-ratio (up to 10) one-dimensional...

Fabrication of high-aspect-ratio (up to 10) one-dimensional organic/inorganic hybrid nanogratings via holographic lithography

Li, Jie, Yang, Shu
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Volume:
128
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.06.004
Date:
October, 2014
File:
PDF, 1007 KB
english, 2014
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