Complex Boron Redistribution in P+ Doped-polysilicon /...

Physics Procedia 2014 Vol. 55

Complex Boron Redistribution in P+ Doped-polysilicon / Nitrogen Doped Silicon Bi-layers during Activation Annealing

Abadli, S., Mansour, F., Perrera, E. Bedel
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Volume:
55
Year:
2014
Language:
english
Journal:
Physics Procedia
DOI:
10.1016/j.phpro.2014.07.001
File:
PDF, 459 KB
english, 2014
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