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Characteristics of the planar plasma source sustained by microwave power
Odrobina, Igor, Kúdela, Jozef, Kando, MasashiVolume:
7
Language:
english
Journal:
Plasma Sources Science and Technology
DOI:
10.1088/0963-0252/7/2/018
Date:
May, 1998
File:
PDF, 793 KB
english, 1998