High quality aluminium doped zinc oxide target synthesis...

Thin Solid Films 2014 / 09 Vol. 566

High quality aluminium doped zinc oxide target synthesis from nanoparticulate powder and characterisation of sputtered thin films

Isherwood, P.J.M., Neves, N., Bowers, J.W., Newbatt, P., Walls, J.M.
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Volume:
566
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.07.032
Date:
September, 2014
File:
PDF, 2.17 MB
english, 2014
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