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Study of Deposition Temperature Effect on Defect Density in ZrN Thin Films by Positron Annihilation
Saleh, Abdulnasser S.Volume:
75
Year:
2014
Language:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2013.11.007
File:
PDF, 487 KB
english, 2014