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Optimizing TiN Coating Surface Roughness with RSM
Yim, S.L., Yu, Kai Ming, Chan, Luen Chow, Kwok, D., Lee, Tai ChiuVolume:
532-533
Year:
2006
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.532-533.424
File:
PDF, 273 KB
english, 2006