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[IEEE 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Sanya, China (2008.01.6-2008.01.9)] 2008 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Design and fabrication of a novel tri-axis micro-gyroscope
Nan-Chyuan Tsai,, Chung-Yang Sue,, Chih-Che Lin,Year:
2008
Language:
english
DOI:
10.1109/NEMS.2008.4484371
File:
PDF, 560 KB
english, 2008