Evaluation of High-Speed Linear Air-Knife Based Wafer Dryer

Solid State Phenomena 2012 / 12 Vol. 195

Evaluation of High-Speed Linear Air-Knife Based Wafer Dryer

Tamaddon, Amir Hossein, Belmiloud, Naser, Doumen, Geert, Struyf, Herbert, Mertens, Paul W., Heyns, Marc M.
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Volume:
195
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.195.239
Date:
December, 2012
File:
PDF, 316 KB
english, 2012
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