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Finding the Optimum Chloride-Based Chemistry for Chemical Vapor Deposition of SiC
Yazdanfar, M., Danielsson, O., Kordina, O., Janzen, E., Pedersen, H.Volume:
3
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0111410jss
Date:
August, 2014
File:
PDF, 439 KB
english, 2014