Two-dimensional fluid model of an inductively coupled...

Two-dimensional fluid model of an inductively coupled plasma with comparison to experimental spatial profiles

Bukowski, J. D., Graves, D. B., Vitello, P.
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Volume:
80
Year:
1996
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.363169
File:
PDF, 474 KB
english, 1996
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