![](/img/cover-not-exists.png)
Stress and microhardness in sputter deposited molybdenum and chromium films
Window, B.Volume:
10
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.577855
Date:
September, 1992
File:
PDF, 810 KB
english, 1992