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[IEEE 2013 IEEE Sensors - Baltimore, MD, USA (2013.11.3-2013.11.6)] 2013 IEEE SENSORS - Fabrication of z-axis accelerometer with galvanic etch stop and antifuse isolation
Jiang, Xiang, Yang, Heng, Wu, Yanhong, Li, Xinxin, Wang, YuelinYear:
2013
Language:
english
DOI:
10.1109/ICSENS.2013.6688273
File:
PDF, 1.28 MB
english, 2013