Spatial Resolution Evaluation of ZnO Scintillator as an In-situ Imaging Device in EUV Region
Nakazato, Tomoharu, Hori, Tatsuhiro, Shimizu, Toshihiko, Yamanoi, Kohei, Sakai, Kohei, Takeda, Kohei, Nishi, Ryosuke, Minami, Yuki, Cadatal-Raduban, Marilou, Sarukura, Nobuhiko, Nishimura, Hiroaki, AzVolume:
61
Language:
english
Journal:
IEEE Transactions on Nuclear Science
DOI:
10.1109/TNS.2013.2286831
Date:
February, 2014
File:
PDF, 1.20 MB
english, 2014