[IEEE 2013 Transducers & Eurosensors XXVII: The 17th...

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[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - 32×32 Optical phased array with ultra-lightweight high-contrast-grating mirrors

Yoo, B. W., Megens, M., Chan, T. K., Sun, T., Yang, W., Horsley, D. A., Chang-Hasnain, C. J., Wu, M. C.
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Year:
2013
Language:
english
DOI:
10.1109/Transducers.2013.6627315
File:
PDF, 4.00 MB
english, 2013
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