Electrical and Structural Properties of Tin-Doped Indium...

Japanese Journal of Applied Physics 1999 / 5 Vol. 38; Iss. Part 1, No

Electrical and Structural Properties of Tin-Doped Indium Oxide Films Deposited by DC Sputtering at Room Temperature

Song, Pung Keun, Shigesato, Yuzo, Kamei, Masayuki, Yasui, Itaru
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Volume:
38
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.38.2921
Date:
May, 1999
File:
PDF, 184 KB
english, 1999
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