Polymer-Free Patterning of Graphene at Sub-10-nm Scale by...

Polymer-Free Patterning of Graphene at Sub-10-nm Scale by Low-Energy Repetitive Electron Beam

Lan, Yann-Wen, Chang, Wen-Hao, Xiao, Bo-Tang, Liang, Bo-Wei, Chen, Jyun-Hong, Jiang, Pei-hsun, Li, Lain-Jong, Su, Ya-Wen, Zhong, Yuan-Liang, Chen, Chii-Dong
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Volume:
10
Language:
english
Journal:
Small
DOI:
10.1002/smll.201401523
Date:
November, 2014
File:
PDF, 3.86 MB
english, 2014
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