Study of wet etching thin films of indium tin oxide in oxalic acid by monitoring the resistance
Mammana, Suelene S., Greatti, Alessandra, Luiz, Francis H., da Costa, Francisca I., Mammana, Alaide P., Calligaris, Guilherme A., Cardoso, Lisandro P., Mammana, Carlos I.Z., den Engelsen, DanielVolume:
567
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.07.027
Date:
September, 2014
File:
PDF, 2.40 MB
english, 2014