Benzotriazole as a passivating agent during chemical...

Applied Surface Science 2014 / 10 Vol. 315

Benzotriazole as a passivating agent during chemical mechanical planarization of Ni–P alloy substrates

Mu, Yan, Zhong, Mingjie, Rushing, Kenneth J., Li, Yuzhuo, Shipp, Devon A.
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Volume:
315
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2014.07.096
Date:
October, 2014
File:
PDF, 2.83 MB
english, 2014
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