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Benzotriazole as a passivating agent during chemical mechanical planarization of Ni–P alloy substrates
Mu, Yan, Zhong, Mingjie, Rushing, Kenneth J., Li, Yuzhuo, Shipp, Devon A.Volume:
315
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2014.07.096
Date:
October, 2014
File:
PDF, 2.83 MB
english, 2014