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In-laboratory sensitivity calibration of an optical emission spectroscopy system in vacuum ultraviolet wavelength range
Soma, Shuntaro, Kurihara, Kazuaki, Sasaki, KoichiVolume:
53
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.53.048001
Date:
April, 2014
File:
PDF, 324 KB
english, 2014