Atomic Layer Deposition of Zirconium Oxide on Carbon...

IOP Conference Series Materials Science and Engineering 2013 / 12 Vol. 49

Atomic Layer Deposition of Zirconium Oxide on Carbon Nanoparticles

Tamm, A, Peikolainen, A-L, Kozlova, J, Aarik, L, Roosalu, K, Kärkkänen, I, Mändar,, Aarik, J, Kukli, K
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Volume:
49
Language:
english
Journal:
IOP Conference Series: Materials Science and Engineering
DOI:
10.1088/1757-899X/49/1/012019
Date:
December, 2013
File:
PDF, 1.05 MB
english, 2013
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