Comparison of the agglomeration behavior of thin metallic films on SiO[sub 2]
Gadkari, P. R., Warren, A. P., Todi, R. M., Petrova, R. V., Coffey, K. R.Volume:
23
Year:
2005
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1861943
File:
PDF, 2.08 MB
english, 2005