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Depth Profiling of Si-SiO 2 Interface Structures
Suzuki, Toshihisa, Muto, Masaaki, Hara, Motohiro, Yamabe, Kikuo, Hattori, TakeoVolume:
25
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.25.544
Date:
April, 1986
File:
PDF, 1.27 MB
1986