Fabrication of a uniform microlens array over a large area...

Fabrication of a uniform microlens array over a large area using self-aligned diffuser lithography (SADL)

Kim, Hyeon-Don, Yoon, Gun-Wook, Yeon, Jeongho, Lee, Joo-Hyung, Yoon, Jun-Bo
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Volume:
22
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/22/4/045002
Date:
April, 2012
File:
PDF, 835 KB
english, 2012
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