Ion energy distribution functions and Langmuir probe...

Ion energy distribution functions and Langmuir probe measurements in low pressure argon discharges

V. Kaeppelin, M. Carrère, J. Layet
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Volume:
20
Year:
2002
Language:
english
DOI:
10.1116/1.1451274
File:
PDF, 364 KB
english, 2002
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