Synthesis, characterization, and chemical vapor deposition...

Chemistry of Materials 1992 / 07 Vol. 4; Iss. 4

Synthesis, characterization, and chemical vapor deposition properties of primary and secondary neopentylstibine. New antimony precursors for MOCVD

Hendershot, D. Greg, Pazik, John C., Berry, Alan D.
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Volume:
4
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm00022a017
Date:
July, 1992
File:
PDF, 699 KB
english, 1992
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