Room-Temperature Formation of a ZnO-Based Adhesion Layer for Nanoprecision Cu/Glass Metallization
Teraoka, Akira, Watanabe, Mitsuhiro, Nabetani, Yoichi, Kondoh, EiichiVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.05FB04
Date:
May, 2013
File:
PDF, 1.47 MB
english, 2013