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Improved conductivity of aluminum-doped ZnO: The effect of hydrogen diffusion from a hydrogenated amorphous silicon capping layer
Ponomarev, M. V., Sharma, K., Verheijen, M. A., van de Sanden, M. C. M., Creatore, M.Volume:
111
Year:
2012
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3692439
File:
PDF, 1.02 MB
english, 2012