Ion-Beam-Induced Dual-Tone Imaging of Polyimide via...

Chemistry of Materials 2002 / 10 Vol. 14; Iss. 10

Ion-Beam-Induced Dual-Tone Imaging of Polyimide via Two-Step Imidization

Suzuki, Yasuyuki, Maekawa, Yasunari, Yoshida, Masaru, Maeyama, Katsuya, Yonezawa, Noriyuki
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Volume:
14
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm020223j
Date:
October, 2002
File:
PDF, 238 KB
english, 2002
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