Kinetics and Mechanisms of MOCVD Processes for the...

Chemistry of Materials 2002 / 10 Vol. 14; Iss. 10

Kinetics and Mechanisms of MOCVD Processes for the Fabrication of Sr-Containing Films From Sr(hfac) 2 Tetraglyme Precursor

Condorelli, Guglielmo G., Baeri, Annalisa, Fragalà, Ignazio L.
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Volume:
14
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm021190a
Date:
October, 2002
File:
PDF, 107 KB
english, 2002
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