Vacuum ultraviolet photochemistry in thin resist films

Analytical Chemistry 1981 / 06 Vol. 53; Iss. 7

Vacuum ultraviolet photochemistry in thin resist films

Bohn, Paul W., Taylor, James W., Guckel, Henry.
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Volume:
53
Language:
english
Journal:
Analytical Chemistry
DOI:
10.1021/ac00230a036
Date:
June, 1981
File:
PDF, 810 KB
english, 1981
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