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Mechanism of Extreme Ultraviolet Photoresist Development with a Supercritical CO 2 Compatible Salt
Zweber, Amy E., Wagner, Mark, DeYoung, James, Carbonell, Ruben G.Volume:
25
Language:
english
Journal:
Langmuir
DOI:
10.1021/la8043158
Date:
June, 2009
File:
PDF, 4.81 MB
english, 2009