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[Conference Proceedings of the Society for Experimental Mechanics Series] MEMS and Nanotechnology, Volume 8 ||

Prorok, Barton C., Starman, LaVern, Hay, Jennifer, Shaw, III, Gordon
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Volume:
10.1007/97
Year:
2015
Language:
english
DOI:
10.1007/978-3-319-07004-9
File:
PDF, 4.50 MB
english, 2015
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